UL3000 Fab Helium Leak Detector

The INFICON helium leak detector UL3000 Fab (PLUS) is designed for the needs of leak testing in semiconductor applications. It features flexibility, mobility, fast start-up, high sensitivity, fast and precise test results, and reliability. The improved vacuum system with low maintenance vacuum pumps allows the detection of leaks starting from atmospheric pressure. The rugged mass spectrometer system ensures long running time and low maintenance costs. The HYDRO-S software in the UL3000 Fab PLUS eliminates the water vapor background and makes leak testing even faster. The UL3000 Fab PLUS offers also an improved sniffer capability by using the well-proven sniffer line SL3000 which has up to 10 m lengths. ROTATABLE AND REMOTE CONTROLLABLE DISPLAY The new touchscreen display shows test results and status information even from a long distance. Easy operation via user-guided menu structure, even for inexperienced operators. A wireless control of the UL3000 Fab (PLUS) is possible via smartphone or tablet - without special software or Apps. Recording and storage of test results via push button can be transferred to other storage media for further analysis.